JPS6233246Y2 - - Google Patents

Info

Publication number
JPS6233246Y2
JPS6233246Y2 JP1980089440U JP8944080U JPS6233246Y2 JP S6233246 Y2 JPS6233246 Y2 JP S6233246Y2 JP 1980089440 U JP1980089440 U JP 1980089440U JP 8944080 U JP8944080 U JP 8944080U JP S6233246 Y2 JPS6233246 Y2 JP S6233246Y2
Authority
JP
Japan
Prior art keywords
sample
grid
voltage
output
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980089440U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5714438U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980089440U priority Critical patent/JPS6233246Y2/ja
Publication of JPS5714438U publication Critical patent/JPS5714438U/ja
Application granted granted Critical
Publication of JPS6233246Y2 publication Critical patent/JPS6233246Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1980089440U 1980-06-27 1980-06-27 Expired JPS6233246Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980089440U JPS6233246Y2 (en]) 1980-06-27 1980-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980089440U JPS6233246Y2 (en]) 1980-06-27 1980-06-27

Publications (2)

Publication Number Publication Date
JPS5714438U JPS5714438U (en]) 1982-01-25
JPS6233246Y2 true JPS6233246Y2 (en]) 1987-08-25

Family

ID=29451470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980089440U Expired JPS6233246Y2 (en]) 1980-06-27 1980-06-27

Country Status (1)

Country Link
JP (1) JPS6233246Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994351A (ja) * 1982-11-22 1984-05-31 Fujitsu Ltd 半導体素子の電位像出力方法及びその装置
JPS6095843A (ja) * 1983-10-28 1985-05-29 Hitachi Ltd 電子ビ−ム装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5738355B2 (en]) * 1974-08-01 1982-08-14
JPS5947054B2 (ja) * 1974-08-01 1984-11-16 ゴトウ テツヤ 紋織物製造方法

Also Published As

Publication number Publication date
JPS5714438U (en]) 1982-01-25

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